Radiation-sensitive resin composition, and radiation-sensitive acid generating agent

A radiation-sensitive resin composition comprising:

• a compound represented by a formula (1);
• and
• a base polymer
• wherein, in the formula (1), R1 is a group represented by a formula (a1);
• and M+ represents a radiation-degradable monovalent cation,
• R2R41—R3mR42n* (a1)
• wherein, in the formula (a1), R2 represents a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 30 carbon atoms or a heterocyclic group having 3 to 30 ring atoms;
• R3 represents a divalent hydrocarbon group having 1 to 30 carbon atoms, wherein a part or all of hydrogen atoms included in the chain hydrocarbon group, the alicyclic hydrocarbon group and the heterocyclic group represented by R2, and a part or all of hydrogen atoms included in the hydrocarbon group represented by R3 are not substituted or substituted;
• R41 represents —CO—, —COO—, —OCO—, —O—CO—O—, —NHCO—, —CONH—, —NH—CO—O—, —O—CO—NH—, —NH—, —S—, —SO—, —SO2— or —SO2—O—;
• R42 represents —CO—, —COO—, —OCO—, —NHCO—, —CONH—, —NH—CO—O—, —SO— or —SO2—;
• m is an integer of 0 to 2;
• and n is an integer of 0 to 1, wherein in a case where R3, R41 and R42 are each present in a plurality of number, a plurality of R3s, R41s or R42s are each independently as defined, and wherein a site denoted by * is a binding site with —O— in the formula (1).