Barrier film and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsTomoyuki KIKUCHI, Kenichi NAGAYAMA
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Abstract
A barrier film including a plurality of cured layers each cured layer including a curing product of a polysilazane photocurable precursor, an uncured layer disposed between a first and a second cured layer of the plurality of cured layers, the uncured layer including the polysilazane photocurable precursor, and a gradient composition layer disposed between the first and the second cured layer and the uncured layer, wherein a concentration of the polysilazane photocurable precursor in the gradient composition layer increases with a distance from the first and the second cured layers toward the uncured layer.
Claims19
A barrier film comprising:
- a plurality of cured layers, each cured layer comprising a curing product of a polysilazane photocurable precursor;
- an uncured layer disposed between a first and a second cured layer of the plurality of cured layers, the uncured layer comprising the polysilazane photocurable precursor;
- and
- a gradient composition layer disposed between the first and the second cured layer and the uncured layer,
- wherein a concentration of the polysilazane photocurable precursor in the gradient composition layer increases with a distance from the first and the second cured layers toward the uncured layer.
A method of manufacturing of a barrier film, the method comprising:
- forming a polysilazane photocurable precursor layer;
- and
- irradiating ultraviolet rays onto the polysilazane-containing photocurable precursor layer to manufacture the barrier film,
- wherein an exposure dose of the ultraviolet rays ranges from about 0.3 joules per square centimeter to about 65 joules per square centimeter, and
- wherein the exposure dose of the ultraviolet rays increases as a thickness of the precursor layer is increased.
Dependencies are inferred from the claim text.