Vacuum pump components without conversion layers
OwnerMichael Froitzheim, Joseph Heppekausen +2inventors
InventorsMichael Froitzheim, Joseph Heppekausen, Andy Pontolaeng, Lutz Hüsemann
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Abstract
The invention relates to vacuum pump components without conversion layers that are made of valve metals and alloys thereof.
Claims6
Vacuum pump components without conversion layers, made of valve metals or their alloys, characterized in that their surfaces have a coating of at least one oxide and/or oxyfluoride of an element of the group consisting of boron, germanium, aluminum, magnesium, titanium, niobium, hafnium and/or zirconium and mixtures thereof, produced by electroplating and having a layer thickness within a range of from 5 to 50 μm.
A process for preparing vacuum pump components without conversion layers, made of valve metals or their alloys, that are produced by electroplating, characterized by
- (a) providing an anodizing solution containing, in addition to water, at least one other component selected from the group of water-dispersible complex fluorides and oxyfluorides of elements of the group consisting of boron, germanium, aluminum, magnesium, titanium, niobium, hafnium and/or zirconium and mixtures thereof;
- (b) contacting a cathode with said anodizing solution;
- (c) inserting the components as anodes into said anodizing solution;
- (d) applying a voltage between the anode and cathode to apply a surface coating to said components.
Dependencies are inferred from the claim text.