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US 2014/0154465 A1Published application
Substrate support assembly having a plasma resistant protective layer
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Senh Thach, Biraja P. Kanungo, Vahid Firouzdor
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Abstract
A substrate support assembly comprises a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further comprises a protective layer covering an upper surface of the ceramic body, wherein the protective layer comprises at least one of yttrium aluminum garnet (YAG) or a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
Claims20
A substrate support assembly comprising:
- a ceramic body;
- a thermally conductive base bonded to a lower surface of the ceramic body;
- and
- a protective layer covering an upper surface of the ceramic body, wherein the protective layer comprises at least one of yttrium aluminum garnet (YAG) or a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
1 more element
A method comprising:
- providing a ceramic body;
- bonding a thermally conductive base to a lower surface of the ceramic body;
- performing an ion assisted deposition (IAD) process or a plasma spray process to deposit a protective layer on the upper surface of the ceramic body, the protective layer comprising at least one of yttrium aluminum garnet (YAG) or a ceramic compound of Y4Al2O9 and a solid-solution of Y2O3—ZrO2;
- forming a plurality of mesas on at least one of an upper surface of the ceramic body or the protective layer;
- and
- forming a plurality of holes in at least one of the ceramic body or the protective layer.
3 more elements
A method comprising:
- providing a ceramic body;
- applying a bulk sintered ceramic article to an upper surface of the ceramic body, the bulk sintered ceramic article comprising at least one of yttrium aluminum garnet (YAG) or a ceramic compound of Y4Al2O9 and a solid-solution of Y2O3—ZrO2, wherein the bulk sintered ceramic article acts as a protective layer for the ceramic body;
- and
- heating the ceramic body and the bulk sintered ceramic article to form an interface layer between the upper surface of the ceramic body and the bulk sintered ceramic body, wherein the interface layer comprises first elements from the bulk sintered ceramic body that have reacted with second elements from the ceramic body to diffusion bond the ceramic body to the bulk sintered ceramic body;
- and
- bonding a thermally conductive base to a lower surface of the ceramic body.
3 more elements
Dependencies are inferred from the claim text.