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AssigneeSamsung Corning Precision Materials Co., Ltd.
InventorsJung Hong Oh, Jin Soo An, Chang Moog Rim, Gi Mo Yang, Sang Yoon Oh
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A roll-to-roll sputtering method transports a flexible substrate wound on an unwinder roll to a depositing part, forms a deposited film on the flexible substrate, and winds the flexible substrate on a winder roll. The depositing part includes a first depositing part. The first depositing part includes a first sputtering part which deposits a first target material on one surface of the flexible substrate and a heater which is disposed at a side of the other surface of the flexible substrate to heat the flexible substrate.
A roll-to-roll sputtering method which transports a flexible substrate wound on an unwinder roll to a depositing part, forms a deposited film on the flexible substrate, and winds the flexible substrate on a winder roll, wherein the depositing part comprises a first depositing part, the first depositing part comprising:
Dependencies are inferred from the claim text.