Method and apparatus to prewet wafer surface

A method for pre-wetting a wafer surface having patterned structures, comprising:

• vaporizing a liquid to form vaporized liquid molecules;
• delivering the vaporized liquid molecules to the environment near the wafer surface;
• displacing bulk air in the environment surrounding the wafer surface with the vaporized liquid molecules and transporting the vaporized liquid molecules onto the wafer surface and into the patterned structures;
• condensing the vaporized liquid molecules onto the wafer surface to form a pre-implementing adsorbed liquid layer on the wafer surface and in the patterned structures, wherein the pre-implementing adsorbed liquid fully fills the patterned structures by multilayer absorption of the vaporized liquid molecules and the temperature of the wafer surface is above a dew point of the vaporized liquid;
• contacting the wafer surface bearing the pre-implementing adsorbed liquid layer with a processing solution.