Dual arm vacuum robot

A dual arm robot for a substrate processing system, comprising:

• a base;
• a first arm having extended and retracted positions and including:
• a first arm portion having one end rotatably connected to the base;
• a second arm portion having one end rotatably connected to another end of the first arm portion;
• and
• an end effector having one end rotatably connected to another end of the second arm portion and another end configured to support a first substrate;
• and
• a second arm having extended and retracted positions including:
• a first arm portion having one end rotatably connected to the base;
• a second arm portion having one end rotatably connected to another end of the first arm portion;
• and
• an end effector having one end rotatably connected to another end of the second arm portion and another end configured to support a second substrate,
• wherein when the first and second arms are arranged in the retracted position:
• a connection between the second arm portion of the first arm and the end effector of the first arm is located over the second substrate;
• a connection between the second arm portion of the second arm and the end effector of the second arm is located under the first substrate;
• and
• the first substrate is not located over the second substrate.