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US 2014/0153098 A1Published application
Optical filter and optical module having optical filter
AssigneeSeiko Epson Corporation
InventorsYuki HANAMURA, Takeo FUNAKAWA, Tsukasa FUNASAKA
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Abstract
An optical filter includes a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, a second mirror formed on the concave portion and facing the first mirror, and an electrode formed on the second substrate and around the second mirror. The first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.
Claims4
An optical filter comprising:
- a first substrate;
- a first mirror formed on the first substrate;
- a second substrate coupled to the first substrate, the second substrate including a concave portion;
- a second mirror formed on the concave portion and facing the first mirror;
- and
- an electrode formed on the second substrate and around the second mirror,
- wherein the first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.
4 more elements
Dependencies are inferred from the claim text.