Moems apparatus and a method for manufacturing same

An apparatus, comprising;

• a double active layer silicon on insulator substrate that includes first and second active layers separated by an insulating layer, wherein the first active layer has a first plurality of designed shapes and at least one first cavity adapted to be used as a marker, and the second active layer has a second plurality of designated shapes and at least one second cavity;
• wherein the second cavity is arranged at a location that essentially corresponds to a location of said first cavity;
• and
• wherein the insulating layer extends between the first and the second cavities and is practically transparent so as to allow identification, through said second cavity, said first marker cavity and a reference point;
• and
• wherein the second plurality of designated shapes are located at a pre-determined distance from said at least one reference point.