Gimbaled scanning mirror array
AssigneePrimesense Ltd.
InventorsNaftali Chayat, Yuval Gerson
Life of this patent
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Abstract
An optical scanning device includes a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors. Respective spindles connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.
Claims21
An optical scanning device, comprising a substrate, which is etched to define:
- an array of two or more parallel micromirrors;
- a support surrounding the micromirrors;
- respective spindles connecting the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support;
- and
- one or more flexible coupling members, which are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.
Scanning apparatus, comprising:
- a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors, wherein the micromirrors are coupled to rotate in mutual synchronization about respective parallel first axes of rotation relative to the support while the support rotates about a second axis relative to the substrate;
- and
- an electromagnetic drive, which is coupled to cause the micromirrors and the support to rotate respectively about the first and second axes.
A method for producing an optical scanning device, the method comprising etching a substrate so as to define:
- an array of two or more parallel micromirrors;
- a support surrounding the micromirrors;
- respective spindles connecting the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support;
- and
- one or more flexible coupling members, which are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.
A method for scanning, comprising:
- providing a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors;
- driving the micromirrors to rotate in mutual synchronization about respective parallel first axes of rotation relative to the support while driving the support to rotate about a second axis relative to the substrate;
- and
- directing a beam of light toward the micromirror array while the micromirrors and the support rotate, so as to cause the micromirrors to scan the beam over a scene.
Dependencies are inferred from the claim text.