Substrate defect inspection method, substrate defect inspection apparatus and non-transitory computer-readable storage medium

A non-transitory computer readable storage medium storing a program for causing a computer to execute a method of inspecting a substrate for a defect on a basis of a substrate image imaged by an imaging apparatus,

• the substrate inspection method comprising:
• imaging a substrate being an imaging object under a predetermined imaging condition;
• extracting a mode of pixel values of the imaged substrate image;
• calculating a correction value for the imaging condition on a basis of the extracted pixel value and preset imaging condition correction data;
• changing the imaging condition on a basis of the correction value, and imaging again the substrate being the imaging object under the changed imaging condition;
• and
• inspecting the substrate for a defect on a basis of a substrate image imaged under the changed imaging condition.

An apparatus for inspecting a substrate for a defect, comprising:

• an imaging apparatus configured to image the substrate;
• a pixel value extraction part configured to extract, from a substrate image imaged by the imaging apparatus under a predetermined imaging condition, a mode of pixel values of the substrate image;
• a correction value calculation part configured to calculate a correction value for the imaging condition on a basis of the extracted pixel value and preset imaging condition correction data;
• and
• an imaging condition changing part configured to change the imaging condition on a basis of the correction value.