Ionization gauge with operational parameters and geometry designed for high pressure operation
AssigneeBrooks Automation, Inc.
InventorGerardo A. Brucker
Life of this patent
Estimating the term…
Abstract
An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
Claims12
A process comprising:
- providing a substrate;
- evacuating a tool to perform processes on the substrate in the tool;
- measuring pressure by providing:
- at least one electron source that generates electrons;
- a collector electrode that collects ions formed by the impact between the electrons and gas molecules;
- and
- an anode configured to switch a bias voltage relative to a bias voltage of the collector electrode based on a predetermined pressure;
- and
- conducting operations on the substrate in the vacuum environment to form a processed substrate.
A process comprising:
- measuring a parameter of the process using an analytical tool;
- and
- measuring pressure by providing:
- at least one electron source that generates electrons;
- a collector electrode that collects ions formed by the impact between the electrons and gas molecules;
- and
- an anode configured to switch a bias voltage relative to a bias voltage of the collector electrode based on a predetermined pressure.
An ionization gauge to measure pressure comprising:
- at least one electron source that generates electrons;
- and
- an anode that defines an ionization volume therein;
- at least one collector electrode located outside of the anode that collects ions formed by the impact between the electrons and gas molecules.
A method of measuring a gas pressure from gas molecules and atoms, comprising the steps of:
- producing electrons from at least one electron source;
- transmitting the electrons to an anode to form ions in an ionization volume within the anode;
- and
- collecting ions formed by impact between the electrons and the gas molecules and atoms by collecting ions located outside of the anode.
Dependencies are inferred from the claim text.