Plasma pulse tracking system and method

A system for tuning a first radio frequency (RF) matching network during pulsed mode operation, comprising:

• an RF generator configured to supply a pulsing process signal to a target in a plasma processing chamber via the first RF matching network;
• a phase and magnitude detector circuit coupled to the RF generator and configured to sense the pulsing process signal and to output a magnitude error signal and a phase error signal;
• a pulse tracking circuit electrically coupled to the phase and magnitude detector circuit and configured to receive the magnitude error signal and the phase error signal and to output a first tracked magnitude signal and a first tracked phase signal;
• and
• a match controller electrically coupled to the pulse tracking circuit and the first RF matching network and configured to receive the first tracked magnitude signal and the first tracked phase signal and to vary an impedance of the first RF matching network in response to the first tracked magnitude signal and the first tracked phase signal.

A method of tuning a first radio frequency (RF) matching network of a plasma chamber during pulse mode operation, the method comprising:

• transmitting a pulsing process signal from an RF generator to the plasma chamber via the first RF matching network;
• sensing the pulsing process signal with a phase and magnitude detector circuit coupled to the RF generator;
• outputting a magnitude error signal and a phase error signal with the phase and magnitude detector circuit;
• receiving and converting the magnitude error signal and the phase error signal into a first tracked magnitude signal and a first tracked phase signal with a pulse tracking circuit electrically coupled to the phase and magnitude detector circuit;
• and
• varying an impedance of the first RF matching network with a match controller in response to the first tracked magnitude signal and the first tracked phase signal to reduce reflected power from the plasma chamber, the match controller being electrically coupled to the pulse tracking circuit and the first RF matching network.