Device for Precision Displacement
OwnerAlexander Potemkin, Petr Nikolaevich Luskinovich +1inventors
InventorsAlexander Potemkin, Petr Nikolaevich Luskinovich, Vladimir Alexandrovich Zhabotinsky
Life of this patent
Estimating the term…
Abstract
A device for performing a precision movement comprising a plate composed of piezoelectric material and comprising electrodes which are provided at mutually opposite and preferably parallel planes, are connectable to a controlled voltage source having electrical voltage and in this case bring about a change in the form and/or mass of the plate is characterized in that at least one of the electrodes is designed in an elastic fashion to form a base module.
Claims10
A device for performing a precision movement, comprising:
- a plate made of a piezoelectric material;
- electrodes arranged parallel to one another and configured to be connectable to a voltage source having a controlled electrical voltage sufficient to cause a change in at least one of a form and at least one dimension of the plate;
- and
- a top layer that is at least one of a protecting layer and a reading layer is fixed to a free top side of a base module via a non-elastic fixed electrode,
- wherein
- at least one of the electrodes is a portion of an elastic base module,
- the plate is a monocrystalline material having at least one of a low degree of hysteresis and a low degree of creep strain, and
- an orientation of crystal axes of the monocrystalline material is arranged with respect to planes including the electrodes such that when the controlled electrical voltage is applied, a change in at least one of the form and dimensions of the plates is at least one of perpendicular and parallel to the electrodes.
2-3. (canceled)
Dependencies are inferred from the claim text.