Enhanced re-hosting capability for legacy hardware and software
AssigneeApplied Materials, Inc.
InventorsRonald Vern Schauer, Mark Roger Covington, Suresh Kumaraswami, Amitabh Puri
Life of this patent
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Abstract
Embodiments of the invention are directed toward systems and methods that execute legacy semiconductor applications using a non-legacy controller. In some embodiments a hardware abstraction layer and/or an emulator can be used to provide communication between a non-legacy operating system and legacy components including legacy applications. In some embodiments various methods and/or devices can be used to emulate and/or translate communications between legacy and non-legacy components.
Claims29
A semiconductor process control system comprising:
- an operating system;
- a legacy application module that was not developed to operate in conjunction with the operating system, wherein the legacy application module is configured to interface with at least one semiconductor processing chamber and comprising at least one semiconductor processing application;
- and
- a hardware abstraction module configured to provide communication between the operating system and the legacy application module, and configured to interface with an at least one semiconductor processing chamber.
A semiconductor processing control system comprising:
- a semiconductor tool interface;
- a database storing a plurality application files for use with semiconductor tools coupled with the semiconductor tool interface, wherein each of at least a subset of the application files includes instructions for operating a semiconductor tool using Motorola-based protocols;
- an Intel-based processor is configured to process emulation code for emulating a Motorola-based environment that processes at least one of the plurality of application files;
- and
- a bridge communicatively coupled with the Intel-based processor and communicatively coupled with the semiconductor tool interface, wherein the bridge converts communication using Intel-based protocols into communication using Motorola-based protocols and vice versa.
A semiconductor processing control system power supply comprising:
- an AC adapter configured to couple with an AC power source and convert AC power to DC power;
- a processing tool adapter configured to provide power to a semiconductor processing tool;
- a DC control system adapter electrically coupled with the AC adapter and configured to provide power to a control system;
- a DC fan adapter electrically coupled with the AC adapter and configured to provide power to a fan module;
- and
- a power supply control module configured to monitor power consumption.
Dependencies are inferred from the claim text.