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US 2014/0151847 A1Published application
Area-efficient capacitor using carbon nanotubes
AssigneeInternational Business Machines Corporation
InventorsDamon B. Farmer, Aaron D. Franklin, Shu-Jen Han, George S. Tulevski
Life of this patent
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Abstract
An on-chip decoupling capacitor is disclosed. One or more carbon nanotubes are coupled to a first electrode of the capacitor. A dielectric skin is formed on the one or more carbon nanotubes. A metal coating is formed on the dielectric skin. The dielectric skin is configured to electrically isolate the one or more carbon nanotubes from the metal coating.
Claims20
An on-chip decoupling capacitor, comprising:
- one or more carbon nanotubes coupled to a first electrode, wherein the first electrode is configured to include at least on trench;
- a dielectric skin formed on the one or more carbon nanotubes;
- a metal coating formed on the dielectric skin, wherein the dielectric skin is configured to electrically isolate the one or more carbon nanotubes from the metal coating;
- and
- a second electrode forming at least one prong that is configured to extend into the at least one trench of the first electrode.
2 more elements
(canceled)
An integrated chip, comprising:
- a first electrode configured to form at least one trench;
- a second electrode configured to form at least one prong that extends into the at least one trench of the first electrode;
- and
- a separation layer between the first electrode and the second electrode, wherein the separation layer is configured to include one or more carbon nanotubes having a dielectric skin on their surfaces.
1 more element
(canceled)
An on-chip decoupling capacitor, comprising:
- a first electrode configured to form a plurality of trenches;
- a second electrode configured to form a plurality of prongs, wherein a selected prong of the second electrode is configured to extend into a selected trench of the first electrode;
- a separation layer between a first electrode and a second electrode, wherein the separating layer comprises:
- a mesh of carbon nanotubes electrically coupled to the first electrode;
- a dielectric skin formed on the mesh of carbon nanotubes;
- and
- a metal coating formed on the dielectric skin.
4 more elements
Dependencies are inferred from the claim text.