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US 2014/0151825 A1Published application
Giant magneto-resistive sensor and manufacturing method thereof
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsBoum Seock Kim, Eun Tae Park, Se Hoon Jeong, Sung Ho Lee
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Abstract
Disclosed herein are a giant magneto-resistive sensor including a free layer stacked on a substrate and having a rotatable magnetic moment; a ferromagnetic fixed layer having a magnetic moment; a pin layer disposed neighboring the fixed layer; and a spacer layer disposed between the free layer and the fixed layer and having a roughness in an interface contacting the fixed layer, and a method of manufacturing the giant magneto-resistive sensor.
Claims18
A giant magneto-resistive sensor comprising:
- a free layer stacked on a substrate and having a rotatable magnetic moment;
- a ferromagnetic fixed layer having a magnetic moment;
- a pin layer disposed neighboring the fixed layer;
- and
- a spacer layer disposed between the free layer and the fixed layer and having a roughness in an interface contacting the fixed layer.
2 more elements
A method of manufacturing a giant magneto-resistive sensor, the method comprising:
- (A) depositing a free layer formed of a ferromagnetic material having a magnetic moment on a substrate;
- (B) depositing a spacer layer formed of a non-magnetic material on the free layer;
- (C) forming a roughness on the spacer layer;
- (D) depositing a fixed layer formed of the ferromagnetic material having a magnetic moment on the spacer layer;
- and
- (E) depositing a pin layer on the fixed layer.
3 more elements
Dependencies are inferred from the claim text.