Non-volatile graphene nanomechanical switch
AssigneeInternational Business Machines Corporation
InventorsDechao Guo, Shu-Jen Han, Fei Liu, Keith Kwong Hon Wong, Jun Yuan
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AssigneeInternational Business Machines Corporation
InventorsDechao Guo, Shu-Jen Han, Fei Liu, Keith Kwong Hon Wong, Jun Yuan
Estimating the term…
Non-volatile switches and methods for making the same include a gate material formed in a recess of a substrate; a flexible conductive element disposed above the gate material, separated from the gate material by a gap, where the flexible conductive element is supported on at least two points across the gap, and where a voltage above a gate threshold voltage causes a deformation in the flexible conductive element such that the flexible conductive element comes into contact with a drain in the substrate, thereby closing a circuit between the drain and a source terminal. The gap separating the flexible conductive element and the gate material is sized to create a negative threshold voltage at the gate material for opening the circuit.
A non-volatile switch, comprising:
A non-volatile switch, comprising:
16-20. (canceled)
Dependencies are inferred from the claim text.