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US 2014/0151557 A1Published application
Photonic sensor and a method of manufacturing such a sensor
AssigneeAnalog Devices, Inc.
InventorsPaul Martin Lambkin, William Allan Lane
Life of this patent
Estimating the term…
Abstract
A photonic sensor, comprising: a platform, a temperature sensor on the platform; and a structure formed on or as part of the platform.
Claims22
A photonic sensor, comprising:
- a platform supported by at least one slender element;
- a temperature sensor on the platform;
- and
- a structure formed on or as part of the platform.
1 more element
A method of forming a photonic sensor, comprising processing a portion of a semiconductor substrate so as to form a platform held to a supporting structure by at least one leg, and further comprising forming a sub-wavelength structure on an upper surface of the platform, said structure comprising either a plurality of isolated or interconnected upstanding regions.
Dependencies are inferred from the claim text.