US 2014/0151555 A1 · ELECTRON MICROSCOPE

Abstract

Provided is an electron microscope on which a specimen holder with high voltage applied is mountable. The specimen holder has safety (electric shock prevention means), and attention is paid to the specimen holder in terms of operability. The present invention includes a specimen holder having a function of applying a voltage to a specimen mount, disposed to load a specimen, a voltage source that supplies the voltage to be applied to the specimen mount, a voltage cable connected at one end thereof to the specimen holder, and a relay unit to which the other end of the voltage cable is connected, the relay unit being placed on a supporting base that supports a lens barrel of the electron microscope.

Claims14

Dependent claims

An electron microscope comprising:

an electron optical lens barrel that irradiates a specimen with a primary electron beam, detects secondary charged particles obtained by the irradiation of the primary electron beam, and outputs an image signal based on detection results of the secondary charged particles;
a supporting base that supports the electron optical lens barrel;
a specimen holder that includes a specimen mount to mount the specimen on the mount and has a function of applying a voltage to the specimen mount;
a voltage source that supplies the voltage applied to the specimen mount;
a voltage cable that is connected at one end thereof to the specimen holder;
and
a relay unit to which the other end of the voltage cable is connected, the relay unit being placed on the supporting base.

4 more elements

Dependencies are inferred from the claim text.

Electron microscope

Life of this patent

Electron microscope

Life of this patent

Abstract

Claims14