Heater assembly for disk processing system
AssigneeWD Media, LLC
InventorsLANDDELL GREGORY, ZATUL 'ITRI B. ZAINUDDIN, CHI CHOY LIM
Life of this patent
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Abstract
A heater assembly for a disk processing system including a heater element configured to heat a substrate carried by a holder, and a heater cover having an aperture to expose the heater element to the substrate. The cover may be metal to thermally couple the heater to a cooling plate. The cover may have an outer surface having a thermal barrier surrounding the aperture to thermally insulate the holder.
Claims20
A heater assembly for a disk processing system, comprising:
- a heater element configured to heat a substrate carried by a holder;
- and
- a heater cover having an aperture to expose the heater element to the substrate, wherein the heater cover further comprises an outer surface having a thermal barrier surrounding the aperture to thermally insulate the holder.
A heater assembly for a disk processing system, comprising:
- a heater element configured to heat a substrate carried by a holder;
- a cooling plate;
- and
- a heater cover having an aperture to expose the heater element to the substrate, wherein the heater cover comprises a metal to thermally couple the heater element to the cooling plate.
A method of heating a substrate carried by a holder in a disk processing system, comprising:
- heating the substrate with a heater element that radiates through an aperture in a heater cover;
- and
- thermally insulating the holder while heating the substrate via a thermal barrier on an outer surface of the heater cover surrounding the aperture.
A method of heating a substrate carried by a holder in a disk processing system, comprising:
- heating the substrate with a heater element that radiates through an aperture in a metal heater cover;
- and
- thermally coupling the heater element to a cooling plate via a metal heater cover.
Dependencies are inferred from the claim text.