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AssigneeGSI Helmholtzzentrum für Schwerionenforschung GmbH
InventorsThomas Cornelius, Wolfgang Ensinger, Reinhard Neumann, Markus Rauber
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Producing a nanowire structural element with a nanowire array between two cover layers forming a hollow chamber permeated in a column-like manner with nanowires. The process includes: preparing a template foil; application of a first surface covering electroconductive cover layer on a first side of the template foil; generation of numerous nanopores in the template foil; generation of nanowires in the nanopores wherein an electroconductive material fills the nanopores by electrochemical deposition, wherein the nanowires grow within the nanopores on the first cover layer; generation of a second surface filling cover layer on the second side of the template foil thus forming a sandwich-like arrangement of the two cover layers and the template foil permeated with nanowires; and clearing the structured hollow chamber between by dissolving of the template foil and removal of the dissolved template substance, wherein the two cover layers remain intact.
A process for the production of a nanowire structural element with nanowire array between two cover layers forming a hollow chamber permeated in a column-like manner with nanowires, which includes:
A process for production of a nanowire structural element with a nanowire array between the two cover layers to form a column-like hollow chamber-like structure permeated with nanowires by means of the following steps:
Dependencies are inferred from the claim text.