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US 2014/0151216 A1Published application
Sputtering Apparatus and Method of Manufacturing Display Substrate Using the Same
AssigneeSamsung Display Co., Ltd.
InventorsSang-Woo Sohn, Hyung-Jun Kim
Life of this patent
Estimating the term…
Abstract
A sputtering apparatus includes a chamber. A substrate supporting part is disposed in the chamber. A plurality of targets face the substrate supporting part. A target supporting part is disposed under each of the targets to hold the target. A first ground part is disposed between two target supporting parts adjacent to each other and includes a cover separable therefrom. A second ground part is disposed between two target supporting parts adjacent to each other, except for where the first ground part is disposed.
Claims20
A sputtering apparatus comprising:
- a chamber;
- a substrate supporting part disposed in the chamber;
- a plurality of targets disposed within the chamber and facing the substrate supporting part;
- a plurality of target supporting parts, each of the plurality of target supporting parts disposed under a corresponding target of the plurality of targets, the target supporting part configured to hold the plurality of targets;
- a first ground part disposed between a first two adjacent target supporting parts of the plurality of target supporting parts, the first ground part comprising a removable cover;
- and
- a plurality of second ground parts, each of which is disposed between adjacent target supporting parts of the plurality of target supporting parts, except for between the first two adjacent target supporting parts where the first ground part is disposed.
4 more elements
A method of manufacturing a display substrate, comprising:
- forming a thin film on a substrate using a sputtering apparatus, the sputtering apparatus comprising a chamber, a substrate supporting part disposed in the chamber, a plurality of targets facing the substrate supporting part, a target supporting part disposed under each of the plurality of targets, a first ground part disposed between a first two adjacent target supporting parts of the plurality of target supporting parts, the first ground part comprising a removable cover, and a plurality of second ground parts, each of which is disposed between adjacent target supporting parts of the plurality of target supporting parts, except for between the first two adjacent target supporting parts where the first ground part is disposed;
- and
- cutting a cutting line of the substrate, the cutting line running through a center of the first ground part and forming the display substrate.
Dependencies are inferred from the claim text.