Method of wet cleaning aluminum chamber parts

A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces, the method comprising:

• CO2 dry ice blasting at approximately 35 to approximately 45 psi for approximately 5 to approximately 10 minutes the surfaces of the aluminum part;
• flushing the dry ice blasted surfaces of the aluminum part to be cleaned with deionized water at approximately 30 to approximately 40 psi and subsequently drying the aluminum part;
• wiping the flushed surfaces of the aluminum part with isopropyl alcohol;
• wiping the flushed surfaces of the aluminum part with acetone;
• rinsing the wiped aluminum part with deionized water and subsequently removing excess deionized water with compressed dry air;
• masking the aluminum part to conceal the bare aluminum surfaces;
• soaking the masked aluminum part in approximately 30 wt % H2O2 solution for approximately 30 minutes followed by a rinse with deionized water;
• scrubbing the anodized aluminum surfaces of the masked aluminum part for approximately 6 minutes with a #360 diamond pad and deionized water followed by a deionized rinse and blowing off of excess deionized water;
• soaking the masked aluminum part in a solution comprising NH4OH, H2O2, and H2O for approximately 15 minutes followed by a deionized water rinse;
• scrubbing the anodized aluminum surfaces of the masked aluminum part for approximately 8 minutes with a #360 diamond pad and deionized water;
• scrubbing edges and corners of the masked aluminum part with a non-woven fiber scouring pad and deionized water followed by a deionized rinse;
• performing at least one additional repetition of scrubbing anodized aluminum surfaces of the masked aluminum part for approximately 8 minutes with a #360 diamond pad and deionized water and scrubbing the edges and corners of the aluminum part with a non-woven fiber scouring pad and deionized water followed by a deionized water rinse;
• subsequently performing at least two repetitions of soaking the aluminum part in deionized water at or above approximately 65° C. for approximately 45 minutes followed by scrubbing anodized aluminum surfaces of the aluminum part with #360 diamond pad and deionized water;
• subsequently performing at least two repetitions of soaking the aluminum part in deionized water at or above approximately 65° C. for approximately 45 minutes followed by scrubbing anodized aluminum surfaces of the aluminum part with a non-woven fiber scouring pad and deionized water;
• rinsing the aluminum part with deionized water;
• flushing the anodized aluminum surfaces of the rinsed aluminum part for approximately 10 to approximately 20 minutes using deionized water at or above 96° C.;
• scrubbing the anodized aluminum surfaces of the flushed aluminum part using #360 diamond pad and deionized water followed by rinsing with deionized water and drying of the aluminum part;
• wiping the scrubbed aluminum part with a 2 wt % HNO3 solution for approximately 2 minutes and rinsing the aluminum part with deionized water for approximately 2 minutes followed by blowing off excess deionized water;
• wiping the aluminum part with a dilute sulfuric peroxide comprising approximately 5 vol % of approximately 98 wt % H2SO4, approximately 5 vol % of approximately 30 wt % H2O2, and approximately 90 vol % deionized water for approximately 2 minutes followed by rinsing with deionized water for approximately 2 minutes and blowing off of excess water;
• removing the masking from the bare aluminum surfaces;
• wiping the surfaces of the unmasked aluminum part with isopropyl alcohol;
• wiping the surfaces of the unmasked aluminum part with acetone;
• scrubbing the bare aluminum surfaces with a #3000 grit non-woven fiber scouring pad and deionized water;
• rinsing the surfaces of the aluminum part with deionized water for approximately 2 minutes followed by blowing off excess deionized water;
• rinsing the surfaces of the unmasked aluminum part with ultrapure water for approximately 2 minutes followed by ultrasonic cleaning for approximately 20 minutes at a power density of approximately 8 to approximately 15 W/in2;
• and
• rinsing the aluminum part with deionized water for approximately 2 minutes followed by drying of the aluminum part.