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US 2014/0150815 A1Published application
Disc-brush holder apparatus, disc-brush assembly, and substrate processing methods
AssigneeApplied Materials, Inc.
InventorHui Chen
Life of this patent
Estimating the term…
Abstract
In one aspect, a disc-brush pad holder apparatus is disclosed. The disc-brush pad holder apparatus has a first portion adapted to couple to a rotatable adapter, and a pad holding portion having a frontal surface receiving a disc-brush pad, the pad holding portion having a flexible radially-extending disc portion that flexes during cleaning. Disc-brush assemblies and methods of processing substrates are provided, as are numerous other aspects.
Claims20
A disc-brush holder apparatus, comprising:
- a first portion adapted to couple to a rotatable adapter, and
- a pad holding portion coupled to the first portion and having a frontal surface adapted to receive a disc-brush pad, the pad holding portion having a radially-extending disc portion having a spring rate of less than about 30 lb/in when measured by applying a force of 3 lb at an radially-outermost periphery of the radially-extending disc portion.
A disc-brush assembly, comprising:
- a disc-brush holder adapted to receive a disc brush pad, the disc-brush holder including
- a first portion, and
- a pad holding portion coupled to the first portion and having a frontal surface adapted to receive a disc-brush pad, the pad holding portion having a radially-extending disc portion having a spring rate of less than about 30 lb/in when measured by applying a force of 3 lb at an radially-outermost periphery of the radially-extending disc portion;
- an adapter adapted to couple to the first portion of the disc-brush holder and rotate the disc-brush holder;
- and
- a substrate holder adapted to position a substrate adjacent to the disc-brush holder.
3 more elements
A method of processing a substrate, comprising:
- providing a substrate in a substrate holder;
- providing a disc-brush holder including a pad holding portion receiving a disc-brush pad, the pad holding portion having a radially-extending disc portion;
- and
- flexing the radially-extending disc portion while rotating the disc-brush holder in contact with the substrate.
1 more element
Dependencies are inferred from the claim text.