Back to results
US 2014/0150721 A1Published application
Mask frame assembly for thin film deposition
AssigneeSamsung Display Co., Ltd.
InventorsYoon-Chan Oh, Choon-Ho Lee
Life of this patent
Estimating the term…
Abstract
A mask frame assembly for thin film deposition includes a mask frame having an opening, and a mask configured to be coupled to the mask frame and including a first surface for facing a deposition substrate, a second surface opposite the first surface, and a deformation prevention part having varying thicknesses.
Claims23
A mask frame assembly for thin film deposition, the mask frame assembly comprising:
- a mask frame having an opening;
- and
- a mask configured to be coupled to the mask frame and comprising:
- a first surface for facing a deposition substrate;
- a second surface opposite the first surface;
- and
- a deformation prevention part having varying thicknesses.
4 more elements
Dependencies are inferred from the claim text.