Method of coating quartz crucible for growing silicon crystal, and quartz crucible for growing silicon crystal
AssigneeFtb Research Institute Co., Ltd.
InventorsYukichi Horioka, Shiro Sakuragi
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AssigneeFtb Research Institute Co., Ltd.
InventorsYukichi Horioka, Shiro Sakuragi
Estimating the term…
A coating method for coating a crucible and a quartz crucible for growing a silicon crystal are provided. In the coating method, a bubble-free quartz layer which is 80 μm to 4 mm thick is formed on an inner surface of a crucible for growing a silicon crystal, and the surface of the bubble-free quartz layer is covered with alkaline earth hydroxide, following which heating is performed to a temperature at which the surface becomes devitrified. The surface may be covered by immersing the inner surface in a solution of the alkaline earth hydroxide. The heating may be performed before the crucible for growing silicon crystal is filled with a solid raw material to be melted.
A method of coating, comprising the steps of:
A quartz crucible for growing a silicon crystal, comprising:
Dependencies are inferred from the claim text.