Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods

A multi-axis motor drive assembly, comprising:

• a first motor module;
• and
• a second motor module,
• wherein combinations of the first motor module, the second motor module, or both, are assembled to produce a two-axis, three-axis motor, four-axis motor, five-axis motor, or six-axis motor.

A multi-axis robot apparatus, comprising:

• one or more robot arms;
• a first motor module having one-axis capability coupled to the one or more first robot arm of the one or more robot arms;
• and
• a second motor module having two-axis capability coupled to and adapted to move one or more second robot arm of the one or more robot arms.

An electronic device processing system, comprising:

• a transfer chamber;
• a robot apparatus including robot arms received in the transfer chamber and one or more motor modules coupled to the robot arms, at least one motor module including:
• a stator assembly including a stator housing and a stator received in the stator housing;
• a rotor assembly abutting the stator assembly and including:
• a rotor housing,
• a drive shaft,
• a bearing assembly supporting the drive shaft relative to the rotor housing, and
• a rotor coupled to the drive shaft;
• and
• a vacuum barrier member positioned between the rotor and the stator.

A method of assembling a multi-axis drive assembly, comprising:

• providing a first motor module consisting of one-axis capability;
• providing a second motor module consisting of two-axis capability;
• and
• assembling one or more of the first motor module to one or more of the second motor module to form the multi-axis motor assembly.