Pressure sensor, method for manufacture thereof, and pressure detection module

A method for manufacture of a pressure sensor, comprising:

• forming a conductor pattern provided with a pair of electrodes on a base film;
• laminating a photosensitive cover on said base film, and removing at least a portion of said conductor pattern corresponding to said pair of electrodes thereby to cause said portion to be exposed, while covering a remaining portion of said conductor pattern with a remaining portion of said photosensitive cover;
• applying metal plating treatment for prevention of oxidation to the exposed portion of said conductor pattern including said pair of electrodes;
• and
• forming, thereafter, a hollow portion opened to outside air in the removed portion of said photosensitive cover corresponding to said pair of electrodes, by laminating a cover film with a pressure sensing part formed thereon in advance in which contact resistance thereof changes according to a pressure of contact thereof with said electrodes, and by bonding said cover film to the remaining portion of said photosensitive cover by means of an adhesive agent.

A method for manufacture of a pressure sensor, comprising:

• forming a conductor pattern provided with one electrode on a base film;
• laminating a photosensitive cover on said base film, and removing at least a portion of said conductor pattern corresponding to said electrode thereby to cause said portion to be exposed, while covering a remaining portion of said conductor pattern with a remaining portion of said photosensitive cover;
• applying metal plating treatment for prevention of oxidation to the exposed portion of said conductor pattern including said electrode;
• and
• forming, thereafter, a hollow portion opened to outside air in the removed portion of said photosensitive cover corresponding to said electrode, by laminating a cover film with a pressure sensing part, in which contact resistance thereof changes according to a pressure of contact thereof with said electrode, and another electrode electrically connected to said pressure sensing part formed thereon in advance, and by bonding said cover film to the remaining portion of said photosensitive cover by means of an adhesive agent.