Electrostatic pressure sensor

An electrostatic pressure sensor comprising:

• a diaphragm having a center portion that dislocates in accordance with a pressure of a medium to be measured;
• a sensor pedestal that secures a peripheral edge portion of the diaphragm, to form a reference vacuum chamber in cooperation with the diaphragm;
• a cover plate, bonded to an outer peripheral portion of the diaphragm on the opposite side from the sensor pedestal, to form a pressure introduction chamber in cooperation with the diaphragm;
• a stationary electrode that is formed on a surface of the sensor pedestal on the reference vacuum chamber side;
• and
• a movable electrode that is formed on a surface of the diaphragm on the reference vacuum chamber side, facing the stationary electrode, wherein
• the cover plate has a pressure introducing hole that introduces the medium to be measured into the pressure introduction chamber from a direction that is perpendicular to the surface of the diaphragm, and
• the pressure introducing hole is arranged so as to be positioned in a range of between 50.0% and 70.0% from the center of the diaphragm along a direction of the surface of the diaphragm, when the radius of the diaphragm is defined as 100%.