Apparatus and Method for Carrying Substrates
AssigneePlasma-Therm LLC
InventorsDavid Johnson, Shouliang Lai
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Abstract
The present invention provides a method and an apparatus for carrying at least one substrate for plasma processing. The method and apparatus comprising a carrier for transporting the substrate, that is located unbonded on the carrier, onto a substrate support within a plasma system for plasma processing. An electrostatic clamp, that is coupled to the substrate support, electrostatically secures the substrate to the substrate support through the carrier during plasma processing.
Claims31
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A method for carrying at least one substrate for plasma processing, comprising:
- providing a substrate support;
- providing an electrostatic clamp coupled to said substrate support;
- providing a carrier;
- placing the substrate onto said carrier, the substrate is located unbonded on said carrier;
- transporting said carrier with the unbonded substrate onto said substrate support;
- and
- electrostatically clamping the substrate to said substrate support through said carrier by said electrostatic clamp.
Dependencies are inferred from the claim text.