Cylindrical target having an inhomogeneous sputtering surface for depositing a homogeneous film
AssigneePrimestar Solar, Inc.
InventorsScott Daniel Feldman-Peabody, Robert Dwayne Gossman, Mark Jeffrey Pavol
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Abstract
Cylindrical sputtering targets are provided. The cylindrical sputtering target can include a tubular member having a length in a longitudinal direction and defining a tube surface. A source material is positioned about the tube surface of the tubular member and forms a sputtering surface about the tubular member. The source material generally includes a plurality of first areas and a plurality of second areas, each first area comprising a first compound and each second area comprising a second compound that is different than the first compound.
Claims17
A cylindrical sputtering target, comprising:
- a tubular member having a length in a longitudinal direction and defining a tube surface;
- and,
- a source material positioned about the tube surface of the tubular member and forming a sputtering surface about the tubular member, wherein source material comprises a plurality of first areas and a plurality of second areas, each first area comprising a first compound and each second area comprising a second compound that is different than the first compound.
Dependencies are inferred from the claim text.