Non-bonded rotatable targets and their methods of sputtering
AssigneePrimestar Solar, Inc.
InventorsRobert Dwayne Gossman, Scott Daniel Feldman-Peabody, Russell Weldon Black
Life of this patent
Estimating the term…
Loading patent…
AssigneePrimestar Solar, Inc.
InventorsRobert Dwayne Gossman, Scott Daniel Feldman-Peabody, Russell Weldon Black
Estimating the term…
Cylindrical sputtering targets, along with methods of their manufacture and use, are provided. The cylindrical sputtering target includes a tubular member having a length in a longitudinal direction and defining a tube surface, and a source material positioned about the tube surface of the tubular member and forming a sputtering surface about the tubular member. The source material generally defines an inner surface opposite of the sputtering surface and non-bonded to the tube surface of the tubular member. The inner surface of the source material is mechanically engaged to the tube surface of the tubular member, and/or the source material can include a first cylindrical ring directly stacked onto a second cylindrical ring with the first cylindrical ring being mechanically engaged to the second cylindrical ring.
A cylindrical sputtering target, comprising:
(canceled)
7-8. (canceled)
16-20. (canceled)
Dependencies are inferred from the claim text.