Supersonic beam apparatus and cluster ion beam forming method
AssigneeCanon Kabushiki Kaisha
InventorKota Iwasaki
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Abstract
Provided is a supersonic beam apparatus including a nozzle for injecting a gas at a supersonic velocity into a vacuum; a skimmer arranged at a downstream of the nozzle; and an ionization part for ionizing a particle in a supersonic beam formed by the skimmer from the gas injected from the nozzle to form a cluster ion beam, wherein a set position of the skimmer is one of a maximum position where an amount of cluster generation in a relationship of the amount of cluster generation with respect to a distance between the nozzle and the skimmer is maximized and a position closer to the nozzle than the maximum position.
Claims17
A supersonic beam apparatus, comprising:
- a nozzle for injecting a gas at a supersonic velocity into a vacuum;
- a skimmer arranged at a downstream of the nozzle;
- and
- an ionization part for ionizing a particle in a supersonic beam formed by the skimmer from the gas injected from the nozzle to form a cluster ion beam,
- wherein a set position of the skimmer is one of a maximum position where an amount of cluster generation in a relationship of the amount of cluster generation with respect to a distance between the nozzle and the skimmer is maximized and a position closer to the nozzle than the maximum position.
A method of forming a cluster ion beam, the method comprising:
- generating a first beam by injecting a gas from a nozzle at a supersonic velocity into a vacuum;
- generating a second beam containing a particle by a skimmer arranged between the nozzle and a Mach disk formed by the first beam;
- and
- ionizing the particle in the second beam having passed through the skimmer by an ionization part.
Dependencies are inferred from the claim text.