Field Emission Devices and Methods of Making Thereof
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Damian Sojka, Andre Schmenn, Carsten Ahrens
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Abstract
In one embodiment of the present invention, an electronic device includes a first emitter/collector region and a second emitter/collector region disposed in a substrate. The first emitter/collector region has a first edge/tip, and the second emitter/collector region has a second edge/tip. A gap separates the first edge/tip from the second edge/tip. The first emitter/collector region, the second emitter/collector region, and the gap form a field emission device.
Claims36
A electronic device comprising:
- a first emitter/collector region disposed in a substrate, the first emitter/collector region having a first edge/tip;
- a second emitter/collector region disposed in the substrate, the second emitter/collector region having a second edge/tip;
- and
- a gap separating the first edge/tip from the second edge/tip, the first emitter/collector region, the second emitter/collector region, and the gap forming a first field emission device.
A electronic device comprising:
- a first trench disposed in a substrate;
- a first cavity disposed in the substrate under the first trench;
- a second trench proximate the first trench;
- and
- a second cavity disposed in the substrate under the second trench, wherein the first cavity intersects the second cavity at a first edge/tip and a second edge/tip, and wherein the first edge/tip and the second edge/tip form part of a field emission device.
A method of forming an electronic device, the method comprising:
- forming a first trench and a second trench in a substrate;
- and
- forming a first edge/tip and a second edge/tip by forming a first cavity under the first trench and a second cavity under the second trench, wherein the first cavity intersects with the second cavity to form the first edge/tip and the second edge/tip, wherein the first edge/tip is opposite the second edge/tip, and wherein the first edge/tip and the second edge/tip form part of a first field emission device.
Dependencies are inferred from the claim text.