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US 2013/0342960 A1Published application
Thin film capacitor
AssigneeTKD Corporation
InventorsHitoshi SAITA, Yoshihiko YANO, Yasunobu OIKAWA
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Abstract
A thin film capacitor includes a lower electrode layer, a dielectric layer that is provided on said lower electrode layer, and an upper electrode layer that is formed on the dielectric layer. Wherein, the lower electrode layer contains at least a Ni electrode layer, the upper electrode layer configured with at least two layers of a Ni electrode layer and a Cu electrode layer, and the dielectric layer is in contact with both the Ni electrode layer of the lower electrode layer and the Ni electrode layer of the upper electrode layer.
Claims11
A thin film capacitor, comprising:
- a lower electrode layer;
- a dielectric layer that is provided on said lower electrode layer;
- and
- an upper electrode layer that is formed on the dielectric layer;
- wherein
- the lower electrode layer contains at least a Ni electrode layer,
- the upper electrode layer configured with at least two layers of a Ni electrode layer and a Cu electrode layer, and
- the dielectric layer is in contact with both the Ni electrode layer of the lower electrode layer and the Ni electrode layer of the upper electrode layer.
5 more elements
Dependencies are inferred from the claim text.