System for substrate handling and processing
AssigneeTel Solar AG
InventorsChristian EGLI, Damian EHRENSPERGER
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Abstract
This disclosure relates to a substrate processing system for substrates with a surface area of greater than 1 m2. The system may include, but is not limited to, load locks and processing chambers that are aligned in a vertical manner. For example, the load locks may be arranged above or below the processing chambers. In turn, the processing chambers may be stacked upon each other in a vertical arrangement. A transfer chamber may also be used to transfer substrates between the load locks and the process chambers. The substrate transfer process may be done under vacuum conditions.
Claims20
A device, comprising:
- three or more substrate processing modules that are arranged and aligned with each other in a vertical orientation;
- one or more transfer modules that move vertically to transfer one or more substrates to the three or more substrate processing modules;
- two or more load lock modules that are subjacent and aligned in a vertical orientation with the three or more substrate processing modules, the one or more transfer modules can transfer the substrates to and from the two or more load lock modules.
A device, comprising:
- three or more substrate processing modules that are arranged and aligned with each other in a vertical orientation;
- a transfer module that moves vertically to transfer one or more substrates to the three or more substrate processing modules;
- two or more load lock modules that are subjacent and aligned in a vertical orientation with the three or more substrate processing modules, the two or more load lock modules can transfer the substrates to and from the transfer modules.
Dependencies are inferred from the claim text.