Apparatus and method for moving a substrate

A method of moving a substrate, the method comprising:

• placing a substrate on a shoulder of a frame over a lower opening in a substrate holder;
• lifting the substrate holder;
• transporting the substrate holder to a position above a substrate-supporting surface sized to fit through the lower opening;
• lowering the substrate holder until the substrate-supporting surface passes through the lower opening to support the substrate from below;
• and
• further lowering the substrate holder until an upper rim of the frame is lower than the substrate-supporting surface;
• wherein the shoulder projects laterally inward from an inner periphery of the frame below the upper rim;
• wherein the inner periphery defines an upper opening above the lower opening;
• wherein the upper opening is larger than both the lower opening and the substrate;
• and
• wherein the substrate rests in the upper opening when placed on the shoulder of the frame.