Apparatus for substrate treatment and heating apparatus
AssigneeAp Systems Inc.
InventorsIl-Hwan LIM, Jang-Woo SHIM, Chul-Soo KIM, Seung-Ae CHOI
Life of this patent
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Abstract
The present invention relates to an apparatus for heat-treating a substrate, and more particularly to an apparatus for substrate treatment to perform a heat treatment of a substrate for a flat panel display panel. An apparatus for substrate treatment according to an embodiment of the present invention comprises a processing chamber having a substrate treatment space; a heating housing having a heating lamp that emits radiant energy and a reflecting block that reflects radiant energy emitted from the heating lamp; and a window that maintains a sealing between the processing chamber and the heating housing and transmits the radiant energy to a substrate.
Claims27
An apparatus for substrate treatment comprising
- a processing chamber having a substrate treatment space;
- a heating housing having a heating lamp that emits radiant energy and a reflecting block that reflects radiant energy emitted from the heating lamp;
- and
- a window that maintains a sealing between the processing chamber and the heating housing and transmits the radiant energy to a substrate.
An apparatus for substrate treatment comprising
- a processing chamber having a substrate treatment space;
- a heating housing having a heating lamp that emits radiant energy and a reflecting block that reflects radiant energy emitted from the heating lamp;
- and
- a window diffusion plate that maintains a sealing between the processing chamber and the heating housing and has a plurality of through-holes through which the radiant energy passes.
A heating apparatus comprising
- a heating lamp emitting radiant energy;
- a heating housing having a reflecting block that reflects radiant energy emitted from the heating lamp;
- and
- a window that maintains a sealing between the heating housing and a processing chamber and transmits the radiant energy to a substrate.
A heating apparatus comprising
- a processing chamber having a substrate treatment space;
- a heating housing having a heating lamp that emits radiant energy and a reflecting block that reflects radiant energy emitted from the heating lamp;
- and
- a window diffusion plate that maintains a sealing between the processing chamber and the heating housing and has a plurality of through-holes through which the radiant energy passes.
Dependencies are inferred from the claim text.