Defect inspection method and defect inspection device

A defect inspection method comprising the steps of:

• acquiring image data sets of a sample under a plurality of imaging conditions;
• storing a plurality of image data sets acquired under the plurality of imaging conditions in an image storage unit;
• integrating the plurality of image data sets and acquiring a defect candidate;
• cutting out, from the image data sets acquired under at least two imaging conditions and stored in the image storage unit, partial images each including a position of the defect candidate and a periphery of the defect candidate position;
• and
• integrating the partial images acquired under at least two imaging conditions corresponding to the defect candidates, thereby classifying the defect candidates.

A defect inspection method comprising the steps of:

• acquiring image data sets of a sample under a plurality of imaging conditions;
• detecting a defect candidate from each of the plurality of image data sets;
• selecting a defect candidate for calculating a displacement amount of the defect candidate;
• calculating a displacement amount of the defect candidate acquired from the plurality of image data sets based on a displacement amount of the selected defect candidate;
• and
• calculating a correspondence relationship between the respective defect candidates based on the displacement amount, thereby classifying the defect candidates.

A defect inspection device comprising:

• a detection optical system which acquires image data sets of a sample under a plurality of imaging conditions;
• an image storage unit which stores a plurality of image data sets acquired under the plurality of imaging conditions;
• a defect candidate detection unit which detects a defect candidate from each of the plurality of image data sets;
• an image cutting out unit which cuts out, from the image data sets acquired under at least two imaging conditions and stored in the image storage unit, a partial images each including a position of the defect candidate detected in any of the plurality of image data sets and a periphery of the defect candidate position;
• and
• an integration post-processing unit which integrates the partial images acquired under at least two imaging conditions corresponding to the defect candidates to thereby classify the defect candidates.

A defect inspection device comprising:

• a detection optical system which acquires image data sets of a sample under a plurality of imaging conditions;
• an image storage unit which stores a plurality of image data sets acquired under the plurality of imaging conditions;
• a defect candidate detection unit which integrates the plurality of image data sets and acquires a defect candidate;
• an image cutting out unit which cuts out, from the image data sets acquired under at least two imaging conditions and stored in the image storage unit, a partial images each including a position of the defect candidate and a periphery of the defect candidate position;
• and
• an integration post-processing unit which integrates the partial images acquired under at least two imaging conditions corresponding to the defect candidates to thereby classify the defect candidates.

A defect inspection device comprising:

• a detection optical system which acquires image data sets of a sample under a plurality of imaging conditions;
• a defect candidate detection unit which detects a defect candidate from each of the plurality of image data sets;
• a defect candidate selection unit which selects a defect candidate for calculating a displacement amount of the defect candidate;
• a displacement amount calculation unit which calculates a displacement amount of the defect candidate acquired from the plurality of image data sets based on a displacement amount of the selected defect candidate;
• and
• an integration processing unit which calculates a correspondence relationship between the respective defect candidates based on the displacement amount to thereby classify the defect candidates.