Silicon-Based Monolithic Integrated Sonar Array

A silicon-based monolithic integrated sonar array, comprising:

• a cantilevered sensing array structure, a sound-transparent jacket and a support member, wherein the cantilevered sensing array structure is fixed on the support member and is arranged fixedly within the sound-transparent jacket, the sound-transparent jacket is filled with an insulating dielectric oil, the cantilevered sensing array structure is immersed in the insulating dielectric oil, and the sound-transparent jacket is sealed and rendered to be water-tight as an entity;
• the cantilevered sensing array structure comprises a plurality of independent array cells;
• said independent array cell includes a silicon beam, a varistor R1 at a root part of the silicon beam, a Wheatstone bridge formed by connecting resistors R2, R3 and R4 at a support base of the array cell, and a plurality of metal wires;
• a distance between two said independent array cells adjacent to each other is half of a wavelength of a center frequency of signals received thereat.