Position measuring apparatus, pattern transfer apparatus, and method for manufacturing a device
AssigneeCanon Kabushiki Kaisha
InventorsKeiji Emoto, Naoki Maruyama
Life of this patent
Estimating the term…
Abstract
A position measuring apparatus configured to measure a position of an measured object using a plate-like scale including a grating pattern, includes a supporting unit configured to be arranged between a structure and the scale and to support the scale, in which the supporting unit includes a spring element that reduces vibration transferred from the structure to the scale in a plate thickness direction.
Claims13
A position measuring apparatus configured to measure a position of a measured object using a plate-like scale including a grating pattern, the position measuring apparatus comprising a supporting unit configured to be arranged between a structure and the scale and to support the scale,
- wherein the supporting unit includes a spring element that reduces vibration transferred from the structure to the scale in a plate thickness direction.
A pattern transfer apparatus configured to transfer a pattern onto a substrate, the apparatus comprising:
- a moving member configured to be mounted with the substrate and to move;
- and
- a position measuring apparatus configured to measure a position of the moving member using a plate-like scale including a grating pattern,
- wherein the position measuring apparatus includes a supporting unit configured to be arranged between a structure and the scale and to support the scale, and
- wherein the supporting unit includes a spring element that reduces vibration transferred from the structure to the scale in a plate thickness direction.
A method for manufacturing a device, the method comprising:
- transferring a pattern to a substrate using a pattern transfer apparatus;
- and
- developing the substrate onto which the pattern is transferred,
- wherein the pattern transfer apparatus includes:
- a moving member configured to be mounted with the substrate and to move;
- and
- a position measuring apparatus that measures a position of the moving body using a plate-like scale having a grating pattern, and
- wherein the position measuring apparatus includes a supporting unit configured to be arranged between a structure and the scale and to support the scale, and
- wherein the supporting unit includes a spring element that reduces vibration transferred from the structure to the scale in a plate thickness direction.
Dependencies are inferred from the claim text.