High quality factor planar inductors

A method comprising:

• (a) patterning a design in a surface of a substrate, the design defining a trench in a shape of a planar spiral coil;
• (b) forming a line of metal in the trench;
• and
• (c) removing portions of the substrate exposed by the line of metal to form a spacer in the shape of the planar spiral coil, the line of metal being disposed on a surface of the spacer, the spacer elevating the line of metal above the surface of the substrate.

A method comprising:

• (a) forming a dielectric layer on a surface of a substrate;
• (b) forming a metal layer on the dielectric layer;
• and
• (c) patterning a design in the metal layer and the dielectric layer, the design including a shape of a planar spiral coil, the dielectric layer forming a spacer, the spacer elevating a line of metal formed by the metal layer above the surface of the substrate.