Branched siloxanes and methods for synthesis
AssigneeBoard of Regents, The University of Texas System
InventorsGrant Willson, Tsuyoshi Ogawa, MIchael B. Jacobsson
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Abstract
The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
Claims14
A method for synthesizing branched siloxanes, comprising, reacting i) a siloxane which has a silicon-hydrogen bond represented by the formula (a),
- wherein n represents a whole number between 1 and 20, with ii) an asymmetric linear siloxane of formula (b),
- wherein X represents any halogen and m represents a whole number between 2 to 10, said reacting performed under conditions such that a branched siloxane and byproducts are produced.
The branched siloxane Si-12 having the structure shown in FIG. 9.
The functionalized branched siloxane Si-12 having the structure shown in FIG. 6, wherein X is a chemical moiety.
The functionalized branched siloxane Epoxy-Si-12 having the structure shown in FIG. 5.
Dependencies are inferred from the claim text.