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US 2013/0281325 A1Published application
Diamond electrode nanogap transducers
AssigneeIntel Corporation
InventorsOguz H. Elibol, Onur C. Akkaya, Grace M. Credo, Jonathan S. Daniels, Noureddine Tayebi
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Abstract
Embodiments of the invention provide transducers capable of transducing redox active chemical signals into electrical signals. Transducers comprise two electrodes separated by a nanogap. At least one electrode is comprised of conducting diamond. Methods of fabricating nanogap transducers and arrays of nanogap transducers are provided. Arrays of individually addressable nanogap transducers can be disposed on integrated circuit chips and operably coupled to the integrated circuit chip.
Claims23
A device comprising,
- a substrate having a surface, and
- a transducer disposed on the substrate surface, wherein the transducer comprises:
- a first electrode and a second electrode, wherein the first or the second electrode is comprised of conducting diamond, *herein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
- a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, and
- an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity.
2 more elements
The device of c aim 1 wherein the first or the second electrode is comprise of gold or platinum.
A device comprising,
- an integrated circuit chip having a surface, and
- an array of transducers disposed on the integrated circuit chip surface, wherein the array comprises at least 1000 transducers and at least 85% of the transducers are functional transducers, wherein transducers that make up the array are electrically coupled to and individually addressable through electronics in the integrated circuit chip, and wherein a transducer comprises:
- a first electrode and a second electrode, wherein the first or the second electrode is comprised of conducting diamond, wherein the first and second electrodes are independently coupled to the integrated circuit chip through which voltage can be applied to the first and second electrodes and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
- a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, and
- an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity.
2 more elements
A system comprising,
- a computer operably coupled to a integrated circuit chip wherein the integrated circuit chip comprises an array of transducers disposed on a surface of the integrated circuit chip,
- a fluidic system capable of supplying fluids to the surface of the integrated circuit chip comprising the array of transducers,
- wherein transducers that make up the array are electrically coupled to and individually addressable through electronics in the integrated circuit chip, and wherein a transducer comprises:
- a first electrode and a second electrode, wherein the first or the second electrode is comprised of conducting diamond, wherein the first and second electrodes are independently coupled to the integrated circuit chip through which voltage can be applied to the first and second electrodes and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
- a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, and
- an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity.
3 more elements
Dependencies are inferred from the claim text.