Systems and methods for non-periodic pulse sequential lateral solidification

A method for processing a thin film using non periodic laser pulses comprising:

• while advancing a thin film in a selected direction,
• at a first time, generating a first shaped beamlet from a first laser pulse from a primary laser source and irradiating a first region of the film with the first shaped beamlet to form a first molten zone which laterally crystallizes upon cooling to form a first set of crystallized regions;
• at a second time, generating a second shaped beamlet from a second laser pulse from a secondary laser source and irradiating the first region of the film with the second shaped beamlet to form a second molten zone which laterally crystallizes upon cooling to form a second set of crystallized regions;
• and
• at a third time, generating a third shaped beamlet from a third laser pulse from the primary laser source and irradiating a second region of the film with the third shaped beamlet to form a third molten zone which laterally crystallizes upon cooling to form a third set of crystallized regions;
• wherein the time interval between the first time and the third time is more than two times the interval between the first time and the second time.