Contact release capsule useful for chemical mechanical planarization slurry

A slurry comprising a mixture of contact release capsules and a liquid solution, wherein the contact release capsules comprise a particle, a chemical payload, and a polymer coating, wherein:

• the particle comprises a pore or pores which can be impregnated with a chemical payload,
• the chemical payload remains contained in the particle due to the polymer coating present on the outside surface of the particle,
• when the particle contacts a surface and a pre-specified shearing force occurs, the polymer coating is removed, and the chemical payload is free to move away from the particle and into the outside environment,
• wherein the particle is selected from the group consisting of fumed or colloidal silica, fumed or colloidal alumina, ceria, MnO2, ZnO, TiO, any polymer material, and/or combinations thereof,
• wherein the polymer coating is poly(N-isopropylacrylamide) or poly(N-isopropylmethacrylamide).
• wherein the chemical payload is a compound selected from the group consisting of glycine, ethylene-diamine-tetra-acetic-acid, alanine, phthalic acid, citric acid, oxalic acid, acetic acid, tartaric acid, succinic acid, amino acid, ammonium hydroxalate, lactic acid, carboxyl group, amine group, and/or combinations thereof.
• wherein the particle has a porosity in the range of about 0.01 cm3/g to about 0.5 cm3/g.
• wherein the size of the particle is in the range of about 10 nm to about 1 μm.

A method of planarizing and/or polishing a wafer surface comprising performing the chemical mechanical planarization process, wherein the slurry utilized in the process is the slurry comprising a mixture of contact release capsules and a liquid solution, wherein the contact release capsules comprise a particle, a chemical payload, and a polymer coating, wherein:

• the particle comprises a pore or pores which can be impregnated with a chemical payload,
• the chemical payload remains contained in the particle due to the polymer coating present on the outside surface of the particle,
• when the particle contacts a surface and a pre-specified shearing force occurs, the polymer coating is removed, and the chemical payload is free to move away from the particle and into the outside environment,
• wherein the particle is selected from the group consisting of fumed or colloidal silica, fumed or colloidal alumina, ceria, MnO2, ZnO, TiO, any polymer material, and/or combinations thereof,
• wherein the polymer coating is poly(N-isopropylacrylamide) or poly(N-isopropylmethacrylamide).
• wherein the chemical payload is a compound selected from the group consisting of glycine, ethylene-diamine-tetra-acetic-acid, alanine, phthalic acid, citric acid, oxalic acid, acetic acid, tartaric acid, succinic acid, amino acid, ammonium hydroxalate, lactic acid, carboxyl group, amine group, and/or combinations thereof.
• wherein the particle has a porosity in the range of about 0.01 cm3/g to about 0.5 cm3/g.
• wherein the size of the particle is in the range of about 10 nm to about 1 μm.