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AssigneeIntermolecular, Inc.
InventorsUpendra Avachat, Tony Chiang, Craig Hunter, Jian Li, Guizhen Zhang
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The present disclosure is directed to methods of forming different types of Cu2ZnSnS4 (CZTS) solar cells and Copper Indium Gallium DiSelenide (CIGS) solar cells that can be combinatorially varied and evaluated. These methodologies all incorporate the formation of site-isolated regions using a combinatorial processing tool and the use of these site-isolated regions to form the solar cell area. Therefore, multiple solar cells may be rapidly formed on a single substrate for use in combinatorial methodologies. Any of the individual processes of the methods described may be varied combinatorially to test varied process conditions or materials.
A method of combinatorially forming a plurality of solar cells on a single substrate, comprising:
A method of combinatorially forming a plurality of solar cells on a single substrate, comprising:
A method of combinatorially forming a plurality of solar cells on a single substrate, comprising:
Dependencies are inferred from the claim text.