Device for jetting gas and solar cell manufacturing method using the same
AssigneesSamsung Display Co., Ltd., Samsung SDI Co., Ltd.
InventorsGug-Il Jun, In-Ki Kim
Life of this patent
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Abstract
A device for disposing a gas, the device including: a chamber; a plurality of gas jetting plates disposed in the chamber, each gas jetting plate of the plurality of gas jetting plates including a plurality of gas jetting holes disposed on a surface thereof; and a gas pipe fluidly connected to the gas jetting plate and extending outside the chamber, wherein each gas jetting plate includes a first stage, which is fluidly connected to the gas pipe, and a final stage, which includes the plurality of gas jetting holes.
Claims17
A method for manufacturing a solar cell, the method comprising:
- forming a first electrode on a substrate;
- forming a first metal layer comprising copper and gallium on the first electrode;
- forming a second metal layer comprising indium on the first metal layer;
- disposing the substrate comprising the first electrode, the first metal layer, and the second metal layer in a gas jetting device;
- forming a P layer by jetting and heat treating hydrogen selenide onto the second metal layer;
- forming an N layer on the P layer;
- and
- forming a second electrode on the N layer to manufacture the solar cell,
- wherein
- the substrate is supported by the gas jetting device,
- the gas jetting device includes a first stage, which receives the hydrogen selenide from outside of the gas jetting device, and
- a gas jetting plate of the gas jetting device comprises a gas jetting hole, which jets the hydrogen selenide onto the substrate.
A method for manufacturing a solar cell, the method comprising:
- forming a first electrode on a substrate;
- forming a first metal layer comprising copper and gallium on the first electrode;
- forming a second metal layer comprising indium on the first metal layer;
- disposing the substrate comprising the first electrode, the first metal layer, and the second metal layer in a gas jetting device;
- forming a P layer by jetting and heat treating hydrogen selenide onto the second metal layer;
- forming an N layer on the P layer;
- and
- forming a second electrode on the N layer to manufacture the solar cell,
- wherein the gas jetting device includes
- a body, which supplies a gas,
- a gas jetting unit disposed on the body and which jets the gas supplied from the body, and
- wherein the gas jetting unit is disposed in a vertical direction with respect to a surface of the body.
Dependencies are inferred from the claim text.