Coating apparatus and coating method
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsHidenori Miyamoto, Tadahiko Hirakawa, Koichi Misumi
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Abstract
A coating apparatus including a coating part which has a nozzle which ejects a liquid material including an oxidizable metal from a tip portion, and a relative driving unit which moves a substrate and the nozzle in relation to each other so that the tip portion passes through the substrate, such that at least the tip portion of the nozzle provides an affinity control part which is formed so that affinity between the affinity control part and the liquid material is less than that between the liquid materials.
Claims12
A coating apparatus comprising:
- a coating part comprising a nozzle which ejects a liquid material including an oxidizable metal from an ejection portion provided at a tip portion, and
- a relative driving unit which moves a substrate and the nozzle in relation to each other while the tip portion and the substrate face each other, wherein
- at least the tip portion of the nozzle is provided with an affinity control part which is formed so that an affinity between the affinity control part and the liquid material is less than that between the liquid materials.
A method of coating a liquid material including an oxidizable metal on a substrate, comprising:
- directing a tip portion of a coating part, which comprises a nozzle which ejects the liquid material from an ejection portion formed on the tip portion, to the substrate so that the tip portion in the nozzle provides an affinity control part which is formed so that affinity between the affinity control part and the liquid material is less than that between the liquid materials,
- ejecting the liquid material from the ejection portion so that the liquid material is interposed and held between the tip portion and the substrate, and
- moving the tip portion and the substrate in relation to each other while ejecting the liquid material from the ejection portion with the liquid material being interposed and held between the tip portion and the substrate.
Dependencies are inferred from the claim text.